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Modeling of Ion Implantation Induced Damage in Silicon

assignment_turned_inproject15 Feb 2003(Started)-15 Feb 2007(Ended)Closed

Funder: Austrian Science Fund (FWF)Project code: P 15872

Funded under: Einzelprojekte Funder Contribution: 292,656 EUR

Modeling of Ion Implantation Induced Damage in Silicon

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Technische Universität Wien - Institut für Mikro- und Feinwerktechnik , TUW

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Modeling of Ion Implantation Induced Damage in Silicon

Modeling of Ion Implantation Induced Damage in Silicon

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