The project aims at developing enabling technology for waste heat recovery in industrial processes. Their overall efficiency could be improved by converting the waste heat into electricity. The chosen plan consists of implementing clusters of miniature thermodynamic Stirling machines. The core technology is a multiphase piezoelectric smart membrane Stirling engine. It is fabricated using mass production: MEMS machining, assembling and thin film technology. Expected performances allow large fraction of electric energy to be extracted from the low temperature waste heat. The relevance of Stirling cycle for a microminiaturized generator has been demonstrated and basic underlying technologies for its fabrication are available through the project partners’ facilities and capacities. This 42 months work program aims at demonstrating operation and defining opportunity of waste heat recovery using MIcro-STIrling Clusters (MISTIC). The activities will be centered on the development of micro-Stirling generators test prototypes and will include theoretical and experimental analysis of thermal, structural, and fluidic behavior. The partners of the project: SYMME lab. of the Université de Savoie, FEMTO-ST and the international CNRS/UMI-LN2 lab. have demonstrated the required skills and knowledge to complete the work and achieve the objectives. The project will also benefit from the expertise of department of Mechanical Engineering of McGill University especially for MEMS process, modeling and characterization. Requiring a multidisciplinary strategy, the tasks specifically include: 1) The development of thermal isolation frames for micro-devices; 2) The development and characterization of smart membrane structures; 3) The Stirling regenerator optimization; 4) The demonstration of the operation of multiphase micro-Stirling generator; 5) The analysis and selection of industrial applications opportunities. Thus, this project will result in important advances in applied thermal and Power MEMS and heat transfer modeling and optimization.