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The goal of this project is to develop a new type of MEMS magnetometer based on the measurement of the variation of the eigen frequency of a micro resonator on wich has been sputtered a magnetic thin film. This micro magnetometer has a high performances potential and should meet the requirements of new applications such as indoor navigation or unattented ground sensors. A first study has been performed by ONERA and IEF: prototypes have shown the feasibility of this sensor, and a performances model has permitted to validate the benefits of this technology: low power, miniaturization, and resolution that meet the requirements of these new applications. This project includes the study of magnetix thin films, the damping of the resonator by the thin film, the design of an optimized resonator et a complete sensor with its associated electronics and its characterization.
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