To achieve ever shrinking dimensions and higher resolutions of circuit elements, projection lithography (PL), is growing in complexity and cost to manufacturers. It is limited to producing 2D images on flat surfaces. Extension to 3D imaging is restricted by trade-off between focus depth and resolution. Advanced, cost-efficient solutions to fabricate wafer-scale 3D components are required. HoLiSTEP unleashes the potential of sub-wavelength Holographic Lithography (HL) as a powerful and enabling disruptive lithography. HL will overcome limitations of PL and facilitate production of novel 3D topographies with high resolution while making the production of high-resolution IC much more affordable. An industrial prototype operating at 345nm with 200nm resolution will be produced and validated in an operational environment. Several advancements in holographic stepper subcomponents must be realised: A UV fibre-based laser with 20W output power at 345nm and 1.5m coherence length, an alignment system with 25nm overlay precision, an adaptive optical system with correction precision of 1/20λ and software modules for vector diffraction models. Energy consumption of HL technology is drastically reduced compared to PL due to low power-consumption of the laser and production of complex structures in one exposure. HL images are not sensitive to mask defects, eliminating frequent mask replacements and use of toxic materials. Moreover, holographic masks act as projection optics, eliminating the need for complex optical systems. The HL prototype will be verified for 3D patterning for MEMS, MOEMS and micro-optical components to show better resolution, flexibility of 3D printing and reduced cost. HoLiSTEP will empower a positive transformative effect on environment, economy and society by enabling a wider range of companies to produce novel high-resolution 2D and 3D images at lower costs.

X-ray mammography is the mainstay of breast cancer screening programs. It is estimated that between 20 - 50% of abnormal screening mammograms will prove to be negative. The paradigm in diagnosis is to establish whether a lesion is benign or malignant. All the imaging techniques conventionally used today – diagnostic x-ray, ultrasonography and magnetic resonance imaging have many limitations, leading to multiple and/or repeat imaging and often unnecessary biopsy. This leads to physical, psychological and economic burdens felt at individual, familial and societal levels. With an aging population, high incidence of breast cancer and tightening health-care budgets, there is an urgent requirement for a non-invasive method for in-depth assessment of the screening-detected lesion. In PAMMOTH we will showcase such an imager, combining photoacoustic and ultrasound imaging. With the use of quantitative image reconstruction of multi-wavelength photoacoustic data, information is gained of the vascular and oxygen status of the lesion relating to tumor physiology and function. From the ultrasound part, we derive ultrasound reflection from the lesion in a manner superior to conventional breast ultrasonography, relating to anatomic features and extent of a tumor. This information will enable the radiologist to come to a diagnosis accurately and rapidly without the use of contrast agents, without pain and discomfort to the patient, while being cost-effective and not requiring complex infrastructure. Four excellent academic groups, three dynamic SMEs, and a hospital come together with support from key stakeholders in an Advisory group, to push beyond the state-of-the-art in science and technology to achieve the PAMMOTH imager. For the SMEs, in addition to tremendous improvements in individual product lines, the new integrated diagnostic imaging instrument opens up completely new market opportunities. We expect PAMMOTH to have a strong economic and clinical impact.