In this project we aim at demonstrating a photonic-based signal analyzer (PSA) with THz frequency band for on-wafer measurement that will be capable of addressing the needs of emerging millimeter wave and THz devices and systems. It will be based on a micro-machined silicon micro-probe with an integrated photonics-based heterodyne mixer with THz frequency band using an optical local oscillator based on a off-the-shelf 10-GHz-repetition rate mode locked laser. The central part of this demonstration will be the design and the non-linear characterization MMIC’s D band amplifiers up to 1 THz in order to measure the harmonics brought by the non-linear properties of the circuit in addition of the fundamental frequency. In the final part of the project, based on the new experimental data provided by this experimental set-up, non-linear models with better accuracy will be extracted and validated by retro-simulation.