In this project, we will investigate a new smart systems made from a hardware component and a software approach that will enable the creation of programmable matter. The hardware component is a mass-producible, sub-mm, micro-electro-mechanical system (MEMS), namely a micro-robot using computationally controlled electrostatic forces for power distribution, communication, adhesion, and locomotion. The software approach aims to provide a language enabling scalable, real-time, efficient, expressive and safe programming of an ensemble of micro-robots and making this ensemble interacting with others communicating things through the IoT. For hardware, the challenge is to scale down the size of the individual unit to reach a sub-mm programmable robot. For software the challenge is to scale up the number of elements that can be effectively controlled with a single, safe and easy to understand program. We tackle the former by using photolithography as the main manufacturing method and a single effector, a metallic plate, for all the necessary functionality of the unit. The latter is tackled by a real-time distributed logic programming language able to glue together any number of interconnected elements collaborating through the “Internet of things”.